1.发表的论文：
(1)Zhu Yu, Wang Leijie, Zhang Ming, et., al. Novel homodyne frequency-shifting interference pattern locking system. Chinese Optics Letters, 2016, 14(6), 061201
(2) WANG Leijie, ZHANG Ming, ZHU Yu, et al. A novel heterodyne planar grating encoder system for in-plane and out-of-plane displacement measurement with nanometer-resolution [C]// Proceedings of the 29th annual meeting of the American Society for Precision Engineering. Raleigh, NC, USA: ASPE, 2014: 173-177.
(3) WANG Leijie, ZHANG Ming, ZHU Yu, et al. Progress on scanning beam interference lithography tool with high environmental robustness for patterning large size grating with nanometre accuracy [C]// Proceedings of the 17th annual meeting of the European Society for Precision Engineering and Nanotechnology. Germany: EUSPEN, 2017: 47-48.
(4)WANG Leijie, ZHANG Ming, ZHU Yu, et al. The next generation heterodyne interferometric grating encoder system for multi-DOF displacement measurement of wafer stage [C]// Proceedings of the 32th annual meeting of the American Society for Precision Engineering. Raleigh, NC, USA: ASPE, 2017,67:326-331.
(5) 王磊杰, 张鸣, 鲁森, 朱煜, 杨开明. 干涉图形相位锁定系统的超精密控制. 光学精密工程, 2017, 25(5): 1213-1221.
(6) 王磊杰, 张鸣, 鲁森, 朱煜, 杨开明. 超精密外差利特罗式光栅干涉仪位移测量系统. 光学精密工程, 2017, 25(12): 2975-2985.
(7) 王磊杰, 张鸣, 朱煜, 鲁森, 杨开明. 扫描干涉光刻机相位锁定系统设计. 清华大学学报（自然科学版）, 2015, 55(7): 722-727.
(8) 朱煜, 王磊杰, 张鸣, 祁利山. 扫描干涉光刻机光束自动准直系统设计. 清华大学学报（自然科学版）, 2015, 55(7): 716-721.
(9) 王磊杰, 张鸣, 朱煜. 基于Modelica的直线电机控制系统建模与仿真研究.系统仿真学报, 2012, 24 (8): 1737-1740.
(10)Zhang Ming, Ni Chang, Zhu Yu, Wang Leijie, et al. Large-range displacement measurement using sinusoidal phase-modulating laser diode interferometer. ChineseOptics Letters, 2017, 17(10), 101201.
(11) Lu, Sen, Yang, Kaiming, Zhu, Yu, Wang, Leijie, Zhang, Ming. Yaw error correction of ultra-precision stage for scanning beam interference lithography systems.Proceedings of the Institution of Mechanical Engineers Part I-Journal of Systems and Control Engineering, 2018,232(7):869-878.
(12)鲁森, 杨开明, 朱煜, 王磊杰, 张鸣. 干涉条纹相位锁定系统. 光学精密工程, 2017, 25(1): 1-7.
(13)鲁森, 杨开明, 朱煜, 王磊杰, 张鸣. 用于扫描干涉场曝光的超精密微动台设计与控制. 光学学报, 2017, 37(10): 1012006.
(14)鲁森, 杨开明, 朱煜, 王磊杰, 张鸣. 扫描干涉场曝光中光栅掩模槽型轮廓预测方法研究. 光学学报, 2018, 38(05): 0505001.
(15)鲁森, 杨开明, 朱煜, 王磊杰, 张鸣. 基于远场干涉的扫描干涉场曝光光学系统设计与分析. 光学学报, 2018, 38(06): 0605001.
2.获得的发明专利：
(1) Ming Zhang, Yu Zhu, Leijie Wang, et al. HETERODYNE GRATING INTERFEROMETER DISPLACEMENT MEASUREMENT SYSTEM. US 9879979 B2. 2018/1/30.
(2) Yu Zhu, Ming Zhang, Leijie Wang, et al. DUAL-FREQUENCY GRATING INTERFEROMETER DISPLACEMENT MEASUREMENT SYSTEM. US 9885556 B2. 2018/2/6.
(3) Yu Zhu, Ming Zhang, Leijie Wang, et al. OPTICAL GRATING PHASE MODULATOR FOR LASER INTERFERENCE PHOTOETCHING SYSTEM. US 9869857 B2. 2018/1/16.
(4) Yu Zhu, Leijie Wang, Ming Zhang, et al. THREE-DOF HETERODYNE GRATING INTERFEROMETER DISPLACEMENT MEASUREMENT SYSTEM. US 9903704 B2. 2018/2/27.
(5) 张鸣, 朱煜, 王磊杰, 等. 一种利用激光干涉仪测量硅片台多自由度位移的装置: 中华人民共和国, ZL201210180146.X [P]. 2012.06.01.
(6) 朱煜, 王磊杰, 张鸣, 等.一种光刻机工件台系统: 中华人民共和国, ZL201310243147.9 [P]. 2013.06.19.
(7) 张鸣, 朱煜, 王磊杰, 等.一种具有图形锁定功能的激光干涉光刻系统: 中华人民共和国, ZL201310017803.3 [P]. 2013.01.17.
(8) 朱煜, 王磊杰, 张鸣,等.一种激光干涉光刻系统: 中华人民共和国, ZL201310017811.8 [P]. 2012.11.09.
(9) 张鸣, 朱煜, 王磊杰, 等.一种二自由度外差光栅干涉仪位移测量系统: 中华人民共和国, ZL201310243113.X [P]. 2013.06.19.
(10) 张鸣, 朱煜, 王磊杰, 等.基于光学倍程法的二自由度零差光栅干涉仪位移测量系统 : 中华人民共和国, ZL201410031125.0 [P]. 2014.01.23.
(11) 张鸣, 朱煜, 王磊杰, 等.一种二自由度外差光栅干涉仪位移测量系统: 中华人民共和国, ZL201410031251.6 [P]. 2014.01.23.
(12) 朱煜, 王磊杰, 张鸣, 等.基于光学倍程法的二自由度外差光栅干涉仪位移测量系统: 中华人民共和国, ZL201410031283.6 [P]. 2014.01.23.
